Ultra fine dust collectorCDFN
Ultra fine dust
|Use||Removal of Ultra fine dust|
|Filter type||Pre-filter, CFM filter, HEPA filter|
|Filter cleaning method||Filter replacing type|
CDFN-Series dust collector is to remove ultrafine dust (PM 2.5) under 2.5㎛ diameter generated from the superchip,
semiconductor manufacturing process.
- Multi-step filter design
- Step 1, Pre-filter: Large size dust is collected by polyester pre-filter.
- Step 2. CFM filter: Small size particles and dust mixed with water or oil are filtered
by CFM filter made of glass fiber.
- Step 3. HEPA filter: 0.3μm particles are removed more than 99.97%
by high performance filter to remove the harmful microorganism
and radioactive dust.
- Applying German analog manometer
Caster (Fixed after installation)
Available for changing the side of inlet
※ It is not suitable for large amount of dust.