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Model CDFN
Use Removal of Ultra fine dust
Filter type Pre-filter, CFM filter, HEPA filter
Filter cleaning method Filter replacing type


CDFN-Series dust collector is to remove ultrafine dust (PM 2.5) under 2.5㎛ diameter generated from the superchip,
semiconductor manufacturing process.


  • Multi-step filter design
    Step 1, Pre-filter: Large size dust is collected by polyester pre-filter.
    Step 2. CFM filter: Small size particles and dust mixed with water or oil are filtered
    by CFM filter made of glass fiber.
    Step 3. HEPA filter: 0.3μm particles are removed more than 99.97%
    by high performance filter to remove the harmful microorganism
    and radioactive dust.
  • Applying German analog manometer


  • 01

    Caster (Fixed after installation)

  • 02

    Available for changing the side of inlet

※ It is not suitable for large amount of dust.